Products
Northglass vertical coating machines mainly produce coated glass for display industry by using magnetron sputtering method depositing transparent conductive films (TCO, ITO, AZO, etc.).
Technical Information :
|
Substrate Size |
customizable |
|
Substrate Thickness |
customizable |
|
Cycle Time |
customizable |
|
Ultimate Pressure |
< 2E-6mbar |
|
Substrate Temperature |
Max.350℃ |
|
Substrate Pretreatment |
LIS (linear ion source) |
|
Coating Technique |
DC planar cathode, intermediate frequency rotary cathode |
Technical Features :
1. Less particulate matter pollution
2. Small floor space requirement
3. Process gas adjustable
4. Multistage heating system for more even of temperature
5. With more convenience on changing targets and maintenance
6. Modular design
